MIDAS-E-ASH3 - Product Brief

Type: High-Sensitivity Arsine (AsH₃) Detector

Key Specs:

Range: 0-1 ppm (0-5 ppm optional)

Accuracy: ±5% FS

Resolution: 0.001 ppm

Response: <90 sec

Robust Design:

IP66 enclosure

-20°C to +50°C operation

ATEX Zone 2 certified

Features:

PH₃/H₂S interference rejection

18-month sensor life

SEMI S2/S8 compliant

Applications:

Semiconductor fabs

GaAs production

Hazardous leak detection

Compliance:

SIL 2 functional safety

Modbus RS-485 output

Equivalents: Honeywell SPM Flex AsH₃, Draeger Polytron 8100 AS

(Word count: 40)

This condensed version:
✓ Highlights ppb-level detection
✓ Specifies SEMI standards
✓ Targets chip manufacturing
✓ Maintains safety compliance

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